@Article{CiCP-9-1,
author = {},
title = {Kinetic Monte Carlo Simulation of Metallic Nanoislands Grown by Physical Vapor Deposition},
journal = {Communications in Computational Physics},
year = {2011},
volume = {9},
number = {1},
pages = {49--67},
abstract = {<p style="text-align: justify;">We report kinetic Monte-Karlo (KMC) simulation of self-assembled synthesis
of nanocrystals by physical vapor deposition (PVD), which is one of the most flexible,
efficient, and clean techniques to fabricate nanopatterns. In particular, self-assembled
arrays of nanocrystals can be synthesized by PVD. However size, shape and density
of self-assembled nanocrystals are highly sensitive to the process conditions such as
duration of deposition, temperature, substrate material, etc. To efficiently synthesize
nanocrystalline arrays by PVD, the process control factors should be understood in detail.
KMC simulations of film deposition are an important tool for understanding the
mechanisms of film deposition. In this paper, we report a KMC modeling that explicitly
represents PVD synthesis of self-assembled nanocrystals. We study how varying
critical process parameters such as deposition rate, duration, temperature, and substrate
type affect the lateral 2D morphologies of self-assembled metallic islands on
substrates, and compare our results with experimentally observed surface morphologies
generated by PVD. Our simulations align well with experimental results reported
in the literature.</p>},
issn = {1991-7120},
doi = {https://doi.org/10.4208/cicp.311209.230410a},
url = {https://global-sci.com/article/80837/kinetic-monte-carlo-simulation-of-metallic-nanoislands-grown-by-physical-vapor-deposition}
}