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• High-Accuracy Polishing Technique Using Dwell Time Adjustment

  S. Satake, K. Yamamoto & S. Igarashi

  2006-01-01

  38718 3882 Pages:701-715

• Feature-Scale Simulations of Particulate Slurry Flows in Chemical Mechanical Polishing by Smoothed Particle Hydrodynamics

  Dong Wang, Sihong Shao, Changhao Yan, Wei Cai & Xuan Zeng

  2014-11-08

  41582 4017 Pages:1389-1418