Total Cross Sections for Electron Scattering from $CF_4$, $C_2F_4$, $C_2F_6$, $C_3F_8$ in the Energy Range from 100 eV to 5000 eV
Year: 2015
Author: Xiaoming Tan, Mingliang Liu
Journal of Atomic and Molecular Sciences, Vol. 6 (2015), Iss. 2 : pp. 113–118
Abstract
The additivity rule for electron scattering from molecule has been revised by considering the difference between the free atom and the corresponding bound atom in the molecule. The total cross sections for electron scattering from plasma etching molecules $CF_4,$ $C_2F_4,$ $C_2F_6$ and $C_3F_8$ have been calculated in the energy range from 100 eV to 5000 eV with the revised additivity rule. The present calculations are compared with the original additivity rule results and the existing experimental data. A better agreement between the present results and the experimental data is obtained.
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Journal Article Details
Publisher Name: Global Science Press
Language: English
DOI: https://doi.org/10.4208/jams.041115.050915a
Journal of Atomic and Molecular Sciences, Vol. 6 (2015), Iss. 2 : pp. 113–118
Published online: 2015-01
AMS Subject Headings: Global Science Press
Copyright: COPYRIGHT: © Global Science Press
Pages: 6
Keywords: total cross section electron scattering the revised additivity rule.