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Sven Blankenburg

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Monte Carlo Simulations of Elastic Scattering with Applications to DC and High Power Pulsed Magnetron Sputtering for <em>Ti</em><sub>3</sub><em>SiC</em><sub>2</sub>

Journal Article

Monte Carlo Simulations of Elastic Scattering with Applications to DC and High Power Pulsed Magnetron Sputtering for <em>Ti</em><sub>3</sub><em>SiC</em><sub>2</sub>

Communications in Computational Physics, Vol. 11 (2012), Iss. 5 : pp. 1618–1642

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